Crossing Automation - Standalone Shuttle-Lock
The Shuttle-Lock (SL) standalone sub-system is a basic building block in the ExpressConnect™ product line. It operates as a complete vacuum wafer handling system and is available as a two-, three- or four-sided system.
Due to the Shuttle-Lock's unique linear motion design, this compact wafer transfer system is able to fulfill many tasks for a wide variety of backbone designs. Additionally, the SL is well suited for a few new wafer-handling applications on the horizon. It can link two different process tools where process sequences may benefit from transferring the processed wafers while still in a vacuum environment. Or, the standalone SL can add an entirely new level of process isolation for steps that may otherwise be incompatible on a common backbone.