Crossing Automation - Shuttle-Lock™ Wafer Tranfer Devices
As the backbone of the ExpressConnect product line, the Shuttle-Lock (SL) performs wafer transfer functions for all high-level system solutions. The SL is a compact vacuum system containing two linear extensions and a combined Z and Theta drive assembly. The SL is fully self-contained, providing all required functions such as pump, vent and control of transfer pressure gases.
The SL can be configured as a two-, three- or four-sided device, which greatly enhances its flexibility. As a configuration-neutral building block, the SL is able to perform many additional wafer-handling functions in the ExpressConnect approach, fully dependant on a customer's process requirements.
Technically, the SL's performance is superior to conventional robotics in key performance parameters such as repeatability, "Swap Time" or wafer exchange time and power consumption using less power than a 130W light bulb on average. The SL articulated extension design offers another attractive feature -- its compact size.