Crossing Automation - Shuttle-Lock/Multi Wafer Buffer
The Shuttle-Lock/Multi Wafer Buffer (SL/MWB) sub-system creates a powerful addition to the ExpressConnect™ vacuum product line. The merger of these two modules cuts cost by sharing infrastructure such as system and motion controls, gas distribution, vacuum plumbing and more. This integrated approach also plays a key role in cycle time reduction.
The SL/MWB sub-system is offered in a number of combinations, including a two-sided Shuttle-Lock and four-sided Multi Wafer Buffer (SL2S/MWB4), which becomes a wafer-transfer point in four directions.
Another configuration, a four-sided Shuttle-Lock and two-sided Multi Wafer Buffer (SL4S/MWB2) positioned at the end of an in-line backbone with three process module positions offers a practical and efficient wafer transfer solution. There are countless possibilities.