Crossing Automation - Shuttle-Lock/Load-Lock
The Shuttle-Lock/Load-Lock (SL/LL) sub-system is the core of the ExpressConnect™ vacuum transfer systems family of products. Applications range from a complete compact backbone solution to an integral building block in more complex designs. It can be built as a single dual wafer Load-Lock with a two-, three- or four-sided Shuttle-Lock as well as a dual Load-Lock with a three-sided Shuttle-Lock. The unique ability to deliver so many different solutions in such a small package and to consistently deliver top-notch throughput is a compelling cost of ownership advantage.
As Moore's Law pushes technology further and further toward more complex process requirements, the gap between critical and non-critical process steps grows larger. This means it is becoming less attractive to build tools on a common backbone due to cost and complexity. The four-sided Shuttle-Lock/Load Lock is a perfect solution for those non-critical applications offering a small low-cost backbone while still being an integral part of the more critical process solution.