Crossing Automation - Multi Wafer Buffer
The Multi Wafer Buffer (MWB) has an important role as the in-line backbone of the ExpressConnect product solution. The MWB makes sure multiple in-line robots don't become a bottleneck due to the high flow of wafers moving both front-to-back and back-to-front in two directions in real time.
To eliminate this bottleneck, Crossing Automation developed the MWB with one axis of motion in the Z direction. Four wafer positions and four sides allow unprocessed wafers from the Load-Lock to pass through the upper two slots in any direction, while the lower two slots are used to pass processed wafers back to the Load-Lock.