Crossing Automation - Load-Lock
The dual-wafer Load-Lock (LL) is specifically designed for high-speed pump and vent cycles. As the name implies, it holds two wafers at a time. Like all ExpressConnect wafer transfer modules, the LL is a self-contained vacuum system. Meeting industry standards, pump and vent cycle performance delivers more than 120 WPH.
In addition to being a single unit, the LL can be used in conjunction with a two-sided Shuttle-Lock SL2S, or two LL's with a three-sided SL3S to create a dual Load-Lock.