Crossing Automation - ExpressSolutions™
Our ExpressSolutions™ comprehensive engineering services bring together our full range of atmospheric and vacuum wafer automation technologies with your product and process requirements to deliver complete, custom wafer transfer platform solutions.
With ExpressSolutions, we bring our experience and understanding of our entire product line and wafer transfer management directly to you, by integrating your ideas with our modules. This allows us to deliver a unique and fully supported custom platform solution that is tailored to your specific process or manufacturing requirements.
Use ExpressSolutions to design, recommend, build, test, deliver, and support the best possible system for your wafer transfer needs.
Case Study
Summary:
Advanced Inquiry Systems, Inc., (AISI) selected Crossing Automation's ExpressSolutions™ engineering services to develop a new automated handling platform for AISI's advanced, full wafer, back-end of line test technology.
Objective:
Develop an automation platform that could serve multiple applications in the test arena. The end product needed to have many of the characteristics of a common cluster tool as well as being modular, expandable, and reliable -- out of the box.
Implementation:
To meet these objectives, we followed the basic tenets of ExpressSolutions: reuse and reconfiguration of standard, proven, off-the-shelf modules. For this project, we selected the SPARTAN™ EFEM as the backbone of the product and the Wafer Engine™ as the secondary wafer handling module. To meet the unique precision alignment and assembly requirements, we turned to an outside supplier of precision stages for a standard off-the-shelf assembly. Having assembled the bulk of the system out of off-the-shelf components, we then set about working with AISI to develop the process-specific technologies (and associated modules) required to enable their advanced test technology.
Results:
This project is representative of the essence and power of ExpressSolutions: a cooperative development project designed to shorten time to market, lower development costs, and most importantly deliver application-specific product solutions that are based on providing minimal new subsystem content through Reuse & Reconfiguration.