Crossing Automation

Larry Wise

Larry Wise

VP of Engineering

Design for Modularity


The concept of modularity in software has come a long way since the pioneering work in 1970s; in mechanical design, modularity is often an incidental outcome. Similar to modularity in software design, the concept must be embedded during the early phases of the system architecture design. Mechanical functionality must be redistributed such that the failure points are isolated to individual modules, and this concept is at the core of Crossing Automation's approach to wafer-level automation. Modular systems allow module replacement without impacting overall system performance, facilitate preventive maintenance planning, reduce the time to repair and improve system availability and uptime.

Design Rules of Modular Automation Systems

The primary objective of modular design is to configure a complex system as a set of independent and distinct sub sets or modules. Modular designs create options that are not available for non-modular or interdependent systems. One option is the ability to re-configure a system for varying customer needs. Functional partitioning allows modular designs to segregate complexity into smaller and more manageable chunks; this reduces the uncertainty in the overall system performance.

We have found the following rules to be helpful in developing modular designs:


Module characterization to compensate for manufacturing variability High performance equipment, such as wafer automation systems are sensitive to variability introduced by manufacturing and assembly processes. Robotic mechanisms and variation in the end-use of the equipment, as examples, require an understanding of the optimal values of the system control parameters, and modular design permits each module to be characterized independently.

Data acquisition and analysis to enhance predictive maintenance implementations

Isolating failure points and determining the optimal set of control parameters provides the ability to measure drift in performance to the module level. Since measurement points are isolated and non-interacting, it is possible to pin-point deviations from normal performance and correlate the deviations to actual hardware to eliminate guesswork. The ease of field replacement, combined with real-time diagnosis, allows for preventive maintenance and results in high overall equipment utilization.

Technical Papers

Behind the Technology: Wafer Engine™

By: Anthony Bonora


Design for Reliability: Can New Approaches in Wafer Handling Design Support the Demand for Better Process Technology?

By Ghulam Mustafa, Ph.D.

Real-Time Frequency Response: Identification of Resonances Leads to Improvements in Mechanical Design

By: Ghulam Mustafa and
Ken Krzeczowski

Automation Technology As I
See It

By: Larry Wise

Modular Control Design Supports Reuse and Scalability

By: Larry Wise

Automation Technology As I
See It

By: Roy Wang